论文标题
用完全电磁粒子中的电磁粒子代码建模非常高频率的大电极电容性等离子体
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
论文作者
论文摘要
在数值上使用新型的能量和电荷限制，在数值上研究了在电容性耦合的等离子体中发生的现象，并以非常高的频率进行了研究。该代码显示出良好的协议，不同的情况具有各种碰撞和吸收力量。尽管在先前的文献中与其他模型证明了基础物理的某些方面，但由于表面模式激发与相应类型的等离子体放电类型的非局部物理学之间的复杂相互作用，粒子中的方法对于预测建模是有利的，在其他模型上很难在其他模型上进行现实地重现。
Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully electromagnetic particle-in-cell / Monte Carlo code ECCOPIC2M. The code shows a good agreement with different cases having various collisionality and absorbed power. Although some aspects of the underlying physics were demonstrated in the previous literature with other models, the particle-in-cell method is advantageous for the predictive modeling due to a complex interplay between the surface mode excitations and the nonlocal physics of the corresponding type of plasma discharges operated at low pressures, which is hard to reproduce in other models realistically.
