论文标题
像素探测器与各向异性导电膜的杂交
Pixel detector hybridisation with Anisotropic Conductive Films
论文作者
论文摘要
混合像素探测器需要适合各自应用的音高的可靠且具有成本效益的互连技术。在ASIC和传感器研发阶段,通常用于小规模应用中,这种互连技术必须适合组装单层,通常可从多项目范围的提交中获得。在CERN EP R&D计划和Aidainnova的合作中,针对未来Collider的顶点探测器应用的创新杂交概念正在开发中。这项贡献介绍了基于各向异性导电膜(ACF)的新开发的内部单DIE互连过程的最新结果。 ACF互连技术用嵌入在粘合剂膜中的导电粒子代替了焊料颠簸。传感器和读取芯片之间的电力连接是通过使用Flip-Chip设备螺栓杆的热量压缩来实现的。需要特定的垫拓扑来通过导电颗粒启用连接,并创建多余的环氧树脂可以流向的腔。该像素垫拓扑是通过内部电气镍浸入黄金(ENIG)镀金工艺实现的,该过程也正在项目中开发。 ENIG和ACF工艺具有TimePix3 ASIC和传感器的资格,具有55 UM像素螺距和14 UM垫直径。 ACF技术也可以用于ASIC-PCB/FPC集成,替换电线粘合或大型焊接技术。这项贡献引入了ENIG电镀和ACF过程,并在TimePix3混合组件上提出了最新结果。
Hybrid pixel detectors require a reliable and cost-effective interconnect technology adapted to the pitch and die sizes of the respective applications. During the ASIC and sensor R&D phase, and in general for small-scale applications, such interconnect technologies need to be suitable for the assembly of single-dies, typically available from Multi-Project-Wafer submissions. Within the CERN EP R&D programme and the AIDAinnova collaboration, innovative hybridisation concepts targeting vertex-detector applications at future colliders are under development. This contribution presents recent results of a newly developed in-house single-die interconnection process based on Anisotropic Conductive Film (ACF). The ACF interconnect technology replaces the solder bumps with conductive particles embedded in an adhesive film. The electro-mechanical connection between the sensor and the read-out chip is achieved via thermo-compression of the ACF using a flip-chip device bonder. A specific pad topology is required to enable the connection via conductive particles and create cavities into which excess epoxy can flow. This pixel-pad topology is achieved with an in-house Electroless Nickel Immersion Gold (ENIG) plating process that is also under development within the project. The ENIG and ACF processes are qualified with the Timepix3 ASIC and sensors, with 55 um pixel pitch and 14 um pad diameter. The ACF technology can also be used for ASIC-PCB/FPC integration, replacing wire bonding or large-pitch solder bumping techniques. This contribution introduces the ENIG plating and ACF processes and presents recent results on Timepix3 hybrid assemblies.