论文标题

未来空间望远镜的超敏感超级THZ微波动力学探测器

Ultra-sensitive Super-THz Microwave Kinetic Inductance Detectors for future space telescopes

论文作者

Baselmans, J. J. A., Facchin, F., Laguna, A. Pascual, Bueno, J., Thoen, D. J., Murugesan, V., Llombart, N., de Visser, P.

论文摘要

未来的远红外,宽松定义为1--10 THz频段的积极冷却的太空体观测值可能只能达到灵敏度,只有受到宇宙背景辐射的限制。这将导致许多数量级的观察速度增加。这种天文台上的光谱仪器需要大量的探测器,其灵敏度表示为噪声等效功率nep = 3 $ \ times 10^{ - 20} $ $ $ $ w \ surd {hz} $。我们介绍了该频率范围的微波动力电感检测器(MKID)的设计,制造和表征,达到了所需的灵敏度。这些设备基于薄膜NBTIN谐振器,该谐振器在辐射吸收的谐振器的短端,使用镜头 - 安特纳纳耦合到亚微米宽度铝传输线。我们通过使用$ \ $ \ $ 1 $ 1 $μm^3 $的小铝体积优化了低NEP的MKID几何形状,并在非常薄(100 nm)的SIN膜上制造铝制部分。两种优化方法还通过增加设备的响应性来减少过量噪声的影响,从而通过降低谐振器的寄生几何电感而进一步增加了噪声。我们使用在1.55 THz附近狭窄带中过滤的热校准源来测量八个MKID相对于检测器吸收的功率的灵敏度。我们以200 Hz的调制频率平均所有测量的MKIDS的调制频率,在200 Hz的调制频率下,我们获得了NEP $ _ {exp}(p_ {abs})\:= \:= \:3.1 \ pm0.9 \ times10^{ - 20} \:w \ surd {hz} $。 NEP受到准颗粒捕获的限制。测得的灵敏度足以容纳未来,积极冷却的空间观测值的光谱观测。此外,提供的设备设计和组件可以适用于最高$ \ $ 10 THz的频率,并且可以轻松地以千叠式阵列实现。

Future actively cooled space-borne observatories for the far-infrared, loosely defined as a 1--10 THz band, can potentially reach a sensitivity limited only by background radiation from the Universe. This will result in an increase in observing speed of many orders of magnitude. A spectroscopic instrument on such an observatory requires large arrays of detectors with a sensitivity expressed as a noise equivalent power NEP = 3 $\times 10^{-20}$ $W\surd{Hz}$. We present the design, fabrication, and characterisation of microwave kinetic inductance detectors (MKIDs) for this frequency range reaching the required sensitivity. The devices are based on thin-film NbTiN resonators which use lens-antenna coupling to a submicron-width aluminium transmission line at the shorted end of the resonator where the radiation is absorbed. We optimised the MKID geometry for a low NEP by using a small aluminium volume of $\approx$ 1$μm^3$ and fabricating the aluminium section on a very thin (100 nm) SiN membrane. Both methods of optimisation also reduce the effect of excess noise by increasing the responsivity of the device, which is further increased by reducing the parasitic geometrical inductance of the resonator. We measure the sensitivity of eight MKIDs with respect to the power absorbed in the detector using a thermal calibration source filtered in a narrow band around 1.55 THz. We obtain a NEP$_{exp}(P_{abs})\:=\:3.1\pm0.9\times10^{-20}\:W\surd{Hz}$ at a modulation frequency of 200 Hz averaged over all measured MKIDs. The NEP is limited by quasiparticle trapping. The measured sensitivity is sufficient for spectroscopic observations from future, actively cooled space-based observatories. Moreover, the presented device design and assembly can be adapted for frequencies up to $\approx$ 10 THz and can be readily implemented in kilopixel arrays.

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