论文标题
基于石墨烯膜阵列的敏感电容压力传感器
Sensitive capacitive pressure sensors based on graphene membrane arrays
论文作者
论文摘要
石墨烯膜的高灵活性，不渗透性和强度是可以实现下一代纳米力学传感器的关键特性。但是，对于电容性压力传感器，单个悬浮石墨烯膜提供的灵敏度太小，无法与商业传感器竞争。在这里，我们意识到高度敏感的电容压力传感器，这些压力传感器由近一万个独立的双层石墨烯膜组成。我们使用一项程序，即使在高温退火之后，我们也使用维持石墨烯的优质材料和机械性能的过程来制造大量的小直径膜。这些传感器使用低成本的电池动力电路板进行读数，其响应性高达47.8 AF PA $^{ - 1} $ mm $ $ $^{ - 2} $，从而优于商业传感器。
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature anneals. These sensors are readout using a low cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa$^{-1}$ mm$^{-2}$, thereby outperforming commercial sensors.
