论文标题
光子蒙特卡洛模拟中的传感器失真效应
Sensor Distortion Effects in Photon Monte Carlo Simulations
论文作者
论文摘要
我们提出了一种使用光子和电子蒙特卡洛方法模拟传感器畸变的详细方法。我们使用三维静电模拟来参数化扰动的电场轮廓以获取非理想传感器的详细信息。我们遵循模拟光子的转换,以及转换的电子对电场模式的随后响应。这些非理想的传感器详细信息可以通过蒙特卡洛方法有效地实现。我们证明,非理想的传感器扭曲具有多种可观察的结果,包括天文图案的修饰,电子扩散尺寸和形状的变形以及平面的失真。我们显示了扩散物理学的分析验证,重现了两种边缘失真,并显示了无场区域,光刻误差和边缘的定性验证。我们还证明,掺杂变异具有不同的可观察后果的两种相关效应。我们表明,累积电子的场变形导致强度依赖性点传播功能和平底线的亚线性方差。该方法在光子模拟器(Phosim)中实现,并且该代码已公开可用。
We present a detailed method to simulating sensor distortions using a photon and electron Monte Carlo method. We use three dimensional electrostatic simulations to parameterize the perturbed electric field profile for non-ideal sensor details. We follow the conversion of simulated photons, and the subsequent response of the converted electrons to the electric field pattern. These non-ideal sensor details can be implemented efficiently in a Monte Carlo approach. We demonstrate that the non-ideal sensor distortions have a variety of observable consequence including the modification of the astrometric pattern, the distortion of the electron diffusion size and shape, and the distortion of flats. We show analytic validation of the diffusion physics, reproduce two kinds of edge distortion, and show qualitative validation of field-free regions, lithography errors, and fringing. We also demonstrate that there are two related effects of doping variation having different observable consequences. We show that field distortions from accumulated electrons lead to intensity-dependent point-spread-functions and the sub-linear variance in flats. The method is implemented in the Photon Simulator (PhoSim) and the code is publically available.